International conference on micro- and nano-electronics 2016 : 3-7 October 2016, Zvenigorod, Russian Federation / Vladimir F. Lukichev, Konstantin V. Rudenko, editors.
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Full Text (via SPIE Digital Library) |
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| Corporate Authors: | , |
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| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2017]
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 10224. |
| Subjects: |
Table of Contents:
- HfO2/Pr2O3 gate dielectric stacks / F. Sidorov; A. Molchanova; A. Rogozhin
- Low resistance Ti/Si/Ti/Al/Ni/Au ohmic contact for AlGaN/GaN HEMT / Stanislav A. Shostachenko; Roman V. Zakharchenko; Roman V. Ryzhuk; Darya A. Kulyamina; Nikolay I. Kargin
- Tungsten alloyed with rhenium as an advanced material for heat-resistant silicon ICs interconnects / A. N. Belov; Yu. A. Chaplygin; A. A. Golishnikov; D. A. Kostyukov; M. G. Putrya; S. O. Safonov; V. I. Shevyakov
- Metal-assisted chemical etching of silicon with different metal films and clusters: a review / O. Pyatilova; S. Gavrilov; A. Sysa; A. Savitskiy; A. Shuliatyev; A. Dudin; A. Pavlov
- Mechanical properties of bimetallic one-dimensional structures / Ekaterina M. Smelova; Ivan I. Sitnikov; Vladimir S. Zelensky; Kseniya M. Tsysar; Valery G. Andreev; Vladimir A. Vdovin; Alexander M. Saletsky
- Optical coefficients of nanometer-thick copper and gold films in microwave frequency range / I. Khorin; N. Orlikovsky; A. Rogozhin; A. Tatarintsev; S. Pronin; V. Andreev; V. Vdovin
- Effective optical constants of silver nanofilms calculated in wide frequency range / Kseniya M. Tsysar; Valery G. Andreev; Vladimir A. Vdovin
- Analysis of contribution from various order diffraction maxima to complex magneto-optical Kerr effect from three-dimensional structures like magnetophotonic crystals / Ivan S. Zarev; Nikolay Yu. Zvezdin; Vladimir A. Paporkov; Alexander V. Prokaznikov
- Modulation of magnetic interaction in Bismuth ferrite through strain and spin cycloid engineering / Rama Shanker Yadav; Hilal Ahmad Reshi; Shreeja Pillai; D. S. Rana; Vilas Shelke
- Quantum-mechanical relaxation model for characterization of fine particles magnetic dynamics in an external magnetic field / I. Mischenko; M. Chuev
- GeSi nanocrystals formed by high temperature annealing of GeO/SiO2 multilayers: structure and optical properties / V. A. Volodin; A. G. Cherkov; V. I. Vdovin; M. Stoffel; H. Rinnert; M. Vergnat
- Hydrogenated amorphous silicon based p-i-n structures with Si and Ge nanocrystals in i-layers / V. A. Volodin; G. K. Krivyakin; A. A. Shklyaev; S. A. Kochubei; G. N. Kamaev; A. V. Dvurechendkii; A. Purkrt; Z. Remes; R. Fajgar; T. H. Stuchliková; J. Stuchlik
- Investigation of the phase formation from nickel coated nanostructured silicon / Yulia I. Shilyaeva; Olga V. Pyatilova; Alexandra Yu. Berezkina; Artem V. Sysa; Alexander A. Dudin; Dmitry I. Smirnov; Sergey A. Gavrilov
- Chemical surface treatment of Ge2Sb2Te5 thin films for phase change memory application / M. S. Mikhailova; S. Y. Nemtseva; V. B. Glukhenkaya; P. I. Lazarenko; A. A. Sherchenkov; S. A. Kozyukhin; S. P. Timoshenkov
- Some important aspects in the glass structure of chalcogenide systems / Viktor S. Minaev; Sergey P. Timoshenkov; Natalia E. Korobova; Viktor V. Kalugin
- Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry / Anton N. Boyko; Olga V. Pyatilova; Rustam M. Kalmykov; Dahir S. Gaev; Sergei P. Timoshenkov; Sergei A. Gavrilov
- Formation of nanoporous structure in silicon substrate using two-stage annealing process / Yuri I. Denisenko; Valery I. Rudakov
- Application of porous alumina formed in selenic acid solution for nanostructures investigation via Raman spectroscopy / Y. V. Nazarkina; S. A. Gavrilov; A. A. Polohin; D. Gromov; Y. P. Shaman
- Low-threshold field emission in planar cathodes with nanocarbon materials / V. Zhigalov; V. Petukhov; A. Emelianov; V. Timoshenkov; Yu. Chaplygin; A. Pavlov; A. Shamanaev
- The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method / S. Dubkov; S. Bulyarskii; A. Pavlov; A. Trifonov; E. Kitsyuk; P. Mierczynski; T. Maniecki; R. Ciesielski; S. Gavrilov; D. Gromov
- Low-dimensional transit-time diodes for terahertz generation / R. Khabutdinov; I. Semenikhin; F. Davydov; D. Svintsov; V. Vyurkov; L. Fedichkin; K. Rudenko; A. V. Borzdov; V. M. Borzdov
- Efficiency of the signal detection in RF and sub THz ranges by means of GaAs tunnel diodes / M. A. Dresvyannikov; A. L. Karuzskii; A. V. Perestoronin; V. V. Priimochenko; A. M. Tskhovrebov; L. N. Zherikhina
- Electrically stimulated high-frequency replicas of a resonant current in GaAs/AlAs resonant-tunneling double-barrier THz nanostructures / A. A. Aleksanyan; A. L. Karuzskii; I. P. Kazakov; Yu. A. Mityagin; V. N. Murzin; A. V. Perestoronin; S. S. Shmelev; A. M. Tskhovrebov
- Photoresponse in graphene field effect transistor under ultra-short pulsed laser irradiation / Aleksei V. Emelianov; Dmitry M. Kireev; Nerea Otero; Pablo Romero; Ivan I. Bobrinetskiy
- Dielectric influence on IV curve of graphene field effect transistor / Stanislav A. Shostachenko; Roman V. Zakharchenko; Gennady I. Zebrev; Yaroslav M. Stanishevskiy; Nikolay I. Kargin
- Sn nanothreads in GaAs: experiment and simulation / I. Semenikhin; V. Vyurkov; A. Bugaev; R. Khabibullin; D. Ponomarev; A. Yachmenev; P. Maltsev; M. Ryzhii; T. Otsuji; V. Ryzhii
- Thin film ruthenium microstructures for transition edge sensors / A. S. Ilin; I. A. Cohn; A. N. Vystavkin; A. G. Kovalenko
- Investigation of memristor effect on the titanium nanowires fabricated by focused ion beam / V. I. Avilov; O. A. Ageev; I. L. Jityaev; A. S. Kolomiytsev; V. A. Smirnov
- Resistive switching of vertically aligned carbon nanotube by a compressive strain / Marina V. Ilina; Yuriy F. Blinov; Oleg I. Ilin; Viktor S. Klimin; Oleg A. Ageev
- Simulation of field-effect transistors and resonant tunneling diodes based on graphene / Igor I. Abramov; Vladimir A. Labunov; Natali V. Kolomejtseva; Irina A. Romanova
- Ensemble Monte Carlo simulation of electron transport in GaAs/AlAs quantum wire structure under the effect of terahertz electric field / Andrei V. Borzdov; Vladimir M. Borzdov; Vladimir V. V'yurkov
- Thermo injecting electrical instability in the AlxGa1-xAs/GaAs heterostructures with tunnel-nontransparent potential barriers / S. A. Nikitov; P. P. Maltsev; V. A. Gergel; A. V. Verhovtseva; N. M. Gorshkova; V. V. Pavlovskiy; V. S. Minkin; A. A. Trofimov; A. Yu. Pavlov; R. A. Khabibullin
- I-V characteristics simulation of silicon carbide Ti/4H-SiC Schottky diode / P. Panchenko; S. Rybalka; A. Malakhanov; E. Krayushkina; A. Radkov
- Development of drift-diffusion numerical models of high-speed on-chip photodetectors with heterojunctions / I. V. Pisarenko; E. A. Ryndin
- Numerical modeling of microwave switchers with subpicosecond time delay / B. Konoplev; E. Ryndin
- Ambipolar memristor-based oscillator / Vladimir V. Rakitin; Alexander V. Rakitin
- The spatially dispersive eigenvalues of permittivity operator and frequency-dependent surface impedance for conductors without the dc dissipation / M. A. Dresvyannikov; A. P. Chernyaev; A. L. Karuzskii; Yu. A. Mityagin; A. V. Perestoronin; N. A. Volchkov
- Calculation of the high-frequency conductivity and the Hall constant of a thin semiconductor film / O. V. Savenko; D. N. Romanov; I. A. Kuznetsova
- A simple calculation method for heavy ion induced soft error rate in space environment / A. M. Galimov; I. V. Elushov; G. I. Zebrev
- Compact modeling of radiation-induced drain leakage current / M. G. Drosdetsky; V. V. Orlov; G. I. Zebrev
- Total ionizing dose effects modeling in common-gate tri-gate FinFETs using Verilog-A / Maxim S. Gorbunov; Gennady I. Zebrev
- Application of triple modular redundancy for soft error mitigation in 65-28 nm CMOS VLSI / A. P. Skorobogatov
- Layout-aware simulation of soft errors in sub-100 nm integrated circuits / A. Balbekov; M. Gorbunov; S. Bobkov
- Silicon ohmic lateral-contact MEMS switch for RF applications / A. Rogozhin; A. Miakonkikh; A. Tatarintsev; K. Lebedev; V. Kalnov; K. Rudenko; V. Lukichev
- A low actuation voltage bistable MEMS switch: design, fabrication and preliminary testing / Ilya V. Uvarov; Victor V. Naumov; Olga M. Koroleva; Elena I. Vaganova; Ildar I. Amirov
- Research of the micromechanical three-axis accelerometer / B. Konoplev; I. Lysenko; E. Ryndin; O. Ezhova; F. Bondarev
- Simulation of heavy charged particles damage on MEMS / V. Shakhnov; A. Glushko; V. Makarchuk; L. Zinchenko; V. Terekhov; S. Mikhaylichenko
- Anchored multi-DOF MEMS gyroscope having robust drive mode / Payal Verma; S. N. Khonina; V. S. Pavelyev; S. A. Fomchenkov; B. V. Uma
- Highly sensitive devices for primary signal processing of the micromechanical capacitive transducers / B. Konoplev; E. Ryndin; I. Lysenko; M. Denisenko; A. Isaeva
- Integral planar supercapacitor with CNT-based composite electrodes for heat-sensitive MEMS and NEMS / E. Lebedev; A. Alekseyev; I. Gavrilin; A. Sysa; E. Kitsyuk; R. Ryazanov; D. Gromov
- Biosensor platform based on carbon nanotubes covalently modified with aptamers / I. A. Komarov; E. I. Rubtsova; A. V. Golovin; I. I. Bobrinetskiy
- Angular MET sensor for precise azimuth determination / Dmitry Zaitsev; Alexander Antonov; Vladimir Krishtop
- The simulation model of planar electrochemical transducer / D. A. Zhevnenko; S. S. Vergeles; T. V. Krishtop; D. V. Tereshonok; E. S. Gornev; V. G. Krishtop
- The planar silicon-based microelectronic technology for electrochemical transducers / A. V. Novikov; A. E. Egorchikov; A. N. Dolgov; E. S. Gornev; V. G. Popov; I. V. Egorov; V. G. Krishtop
- The precision seismometer based on planar electrochemical transducer / A. S. Shabalina; V. G. Krishtop
- 3D simulation of silicon micro-ring resonator with Comsol / S. A. Degtyarev; V. V. Podlipnov; Payal Verma; S. N. Khonina
- Electro-optical converter of zero-order and second-order Bessel laser beams for the photolithography systems / V. D. Paranin; S. N. Khonina
- The formation of photoresist film with thicknesses from 0.7 microns to 100 microns on surfaces with considerable relief by spray coating on the heated substrate / Alexey V. Romashkin; Denis D. Levin; Roman Yu. Rozanov; Vladimir K. Nevolin
- Problems and prospects of maskless (B)EUV lithography / N. I. Chkhalo; V. N. Polkovnikov; N. N. Salashchenko; M. N. Toropov
- Resistless lithography - selective etching of silicon with gallium doping regions / D. Abdullaev; R. Milovanov; D. Zubov
- Features of local anodic oxidation process / A. Belov; Yu. Chaplygin; S. Lemeshko; I. Sagunova; V. Shevyakov
- Deposition of polymers on structures with nano-gaps fabricated between carbon nanotubes by focused ion beam etching / A. V. Romashkin; A. V. Emelianov; K. A. Tsarik; I. I. Bobrinetskiy
- Direct laser patterning of graphene-based biosensors / I. A. Komarov; A. V. Golovin; E. I. Rubtsova; I. I. Bobrinetskiy
- III-Nitride advanced technologies and equipment for microelectronics / S. I. Petrov; A. N. Alexeev; V. V. Mamaev; D. M. Krasovitsky; V. P. Chaly
- Plasma parameters and active species kinetics in CF4/O2/Ar gas mixture: effects of CF4/O2 and O2/Ar mixing ratios / Junmyung Lee; Kwang-Ho Kwon; A. Efremov
- Technology for fabrication of sub-20 nm silicon planar nanowires array / Andrey V. Miakonkikh; Andrey A. Tatarintsev; Alexander E. Rogozhin; Konstantin V. Rudenko
- Comparative study of CF4- and CHF3-based plasmas for dry etching applications / A. Efremov; K.-H. Kwon; A. Morgunov; D. Shabadarova
- Cellular-automata model of oxygen plasma impact on porous low-K dielectric / Askar Rezvanov; Igor V. Matyushkin; Oleg P. Gutshin; Evgeny S. Gornev
- Investigation of the reactive ion etching of Ge2Sb2Te5 thin films / A. Shulyatev; A. Sherchenkov; D. Gromov; P. Lazarenko; A. Sysa; A. Kozmin
- A study of the vertical walls and the surface roughness GaAs after the operation in the combined plasma etching / Viktor S. Klimin; Maxim S. Solodovnik; Vladimir A. Smirnov; Andrey V. Eskov; Roman V. Tominov; Oleg A. Ageev
- Low-damage plasma etching of porous low-k films in CF3Br and CF4 plasmas under low-temperature conditions / A. Miakonkikh; I. Clemente; A. Vishnevskiy; K. Rudenko; M. Baklanov
- Elements for hard X-ray optics produced by cryogenic plasma etching of silicon / Andrey V. Miakonkikh; Alexander E. Rogozhin; Konstantin V. Rudenko; Vladimir F. Lukichev; Vyacheslav A. Yunkin; Anatoly A. Snigirev
- Temperature switching waves in a silicon wafer on lamp-based heating / Vladimir V. Ovcharov; Alexey L. Kurenya; Valery I. Rudakov; Valeriya P. Prigara
- Critical parameters of silicon wafer lamp-based annealing in high power flux of incoherent radiation / Valeriya P. Prigara; Vladimir V. Ovcharov; Valery I. Rudakov; Alexey L. Kurenja
- Evolution of structural properties of Si(001) subsurface layer containing He bubbles by low temperature annealing / Andrey A. Lomov; Kirill D. Shcherbachev; Yury M. Chesnokov; Dmitrii A. Kiselev; Andrew V. Miakonkikh
- Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN / Iosif E. Clemente; Andrey V. Miakonkikh
- Non-destructive determination of thickness of the dielectric layers using EDX / S. A. Sokolov; E. A. Kelm; R. A. Milovanov; D. A. Abdullaev; L. N. Sidorov
- TDR method for determine IC's parameters / V. Timoshenkov; D. Rodionov; A. Khlybov
- Determination of mechanical stress in the silicon nitride films with a scanning electron microscope / N. A. Djuzhev; E. E. Gusev; A. A. Dedkova; N. Patiukov
- Method of stress and measurement modes for research of thin dielectric films of MIS structures / Vladimir V. Andreev; Vladimir M. Maslovsky; Dmitrii V. Andreev; Alexander A. Stolyarov
- Numerical simulation of thin-film microthermocouple for the research of dissipation in tunneling contact / Vladislav V. Kravchenko; Vladimir A. Petukhov
- Classification automation of thermoplastic particles in a cured epoxy matrix according to their size on microscopic images / Victoria A. Sablina; Alexander N. Varnavsky; Andrei N. Varnavsky
- Fundamentals of the fast neutral beams diagnostics / V. Kudrya; Yu. Maishev
- Optical emission 2D-tomography of plasma: case of rectangular two-view scanning and diagonal symmetry of inhomogeneities / A. V. Fadeev; K. V. Rudenko
- Experimental and theoretical investigations of quantum state transfer and decoherence processes in quasi-one-dimensional systems in multiple-quantum NMR experiments / G. A. Bochkin; S. I. Doronin; S. G. Vasil'ev; A. V. Fedorova; E. B. Fel'dman
- Quantum entanglement and quantum discord in dimers in multiple quantum NMR experiments / S. A. Gerasev; E. I. Kuznetsova
- Multifunctional quantum node based on double quantum dot in laser and cavity fields / Alexander V. Tsukanov
- Diamond chip under single-photon driving as a high spatial resolution quantum magnetometer and electrometer / Alexander V. Tsukanov; Igor Yu. Kateev
- Stark-shift based quantum dot-cavity electrometer / Alexander V. Tsukanov; Vadim G. Chekmachev
- Single-photon transmission and spectroscopy of diamond microring isomers / Alexander V. Tsukanov; Igor Yu. Kateev; Maxim S. Rogachev
- Single-electron solitons in magnetic field / M. Rudenko; D. Svintsov; S. Filippov; V. Vyurkov
- Continuous-time quantum walk of two interacting fermions on a cycle graph / Alexey A. Melnikov; Leonid E. Fedichkin
- Quantum-classical crossover in quantum walks mixing time / Leonid Fedichkin; Fedor Meshchaninov
- Broadband biphotons in the single spatial mode through high pump focusing and walk-off effect / K. G. Katamadze; S. P. Kulik
- Quantum states tomography with noisy measurement channels / Yu. I. Bogdanov; B. I. Bantysh; N. A. Bogdanova; A. B. Kvasnyy; V. F. Lukichev
- Schmidt decomposition and multivariate statistical analysis / Yu. I. Bogdanov; N. A. Bogdanova; D. V. Fastovets; V. F. Luckichev
- Study of higher order correlation functions and photon statistics using multiphoton-subtracted states and quadrature measurements / Yu. I. Bogdanov; K. G. Katamadze; G. V. Avosopyants; L. V. Belinsky; N. A. Bogdanova; S. P. Kulik; V. F. Lukichev
- Analysis of quantum tomography protocol efficiency for triphoton polarization states / Yu. I. Bogdanov; Yu. A. Kuznetsov; G. V. Avosopyants; K. G. Katamadze; L. V. Belinsky; N. A. Borshchevskaya
- Numerical characteristics of quantum computer simulation / A. Chernyavskiy; K. Khamitov; A. Teplov; V. Voevodin; Vl. Voevodin
- Effective computation of quantum discord in a multiqubit spin chain / A. Chernyavskiy
- Effect of crosstalk on QBER in QKD in urban telecommunication fiber lines / Vladimir L. Kurochkin; Yuriy V. Kurochkin; Alexander V. Miller; Alexander S. Sokolov; Alan A. Kanapin
- Single photon detector design features / Sergey V. Zaitsev; Vladimir L. Kurochkin; Yury V. Kurochkin
- Fast polarization QKD scheme based on LiNbO3 phase modulators / A. Duplinskiy; V. Ustimchik; A. Kanapin; Y. Kurochkin
- Computer simulation of quantum effects in Tavis-Cummings model and its applications / Yuri I. Ozhigov; Nikita A. Skovoroda; Vitalii Y. Ladunov
- Dark states of atomic ensembles: properties and preparation / Yuri I. Ozhigov
- Selective measurement of quantronium qubit states by using of mesoscopic non-linear oscillator / M. V. Denisenko; A. M. Satanin.