International conference on micro- and nano-electronics 2016 : 3-7 October 2016, Zvenigorod, Russian Federation / Vladimir F. Lukichev, Konstantin V. Rudenko, editors.
Saved in:
| Online Access: |
Full Text (via SPIE Digital Library) |
|---|---|
| Corporate Authors: | , |
| Other Authors: | , |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2017]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 10224. |
| Subjects: |