Chemical vapour deposition [electronic resource] : precursors, processes and applications / edited by Anthony C. Jones, Michael L. Hitchman.

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Bibliographic Details
Online Access:	Full Text (via Knovel)
Other Authors:	Jones, Anthony C., Hitchman, Michael L.
Other title:	Chemical vapor deposition.
Format:	Electronic eBook
Language:	English
Published:	Cambridge, UK : Royal Society of Chemistry, ©2009.
Subjects:	Chemical vapor deposition.

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Holdings details from Online
Call Number:	TS695 .C67 2009
TS695 .C67 2009	Available