Semiconductor measurement technology : Optical and dimensional-measurement problems with photomasking in microelectronics / John M. Jerke.

Saved in:

Bibliographic Details
Online Access:	Search for the full-text version of this title in HathiTrust
Main Author:	Jerke, John M. (Author)
Format:	Government Document Book
Language:	English
Published:	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off., 1975.
Series:	Semiconductor measurement technology. NBS special publication ; 400-20.
Subjects:	Integrated circuits > Masks. Photolithography. Optical measurements. Circuits intégrés > Masques. Photolithographie. Mesures optiques.

Internet

Holdings details from Norlin Library - Government Information - US
Call Number:	C 13.10:400-20
C 13.10:400-20	Available Place a Hold