Dry etching technology for semiconductors / Kazuo Nojiri.
This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which pa...
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| Online Access: |
Full Text (via Springer) |
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| Format: | eBook |
| Language: | English |
| Published: |
Cham :
Springer,
[2014]
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| Subjects: |
Internet
Full Text (via Springer)Online
| Call Number: |
TA2020
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| TA2020 | Available |