Plasma processing of semiconductors / edited by P.F. Williams.
Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage rang...
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Corporate Authors: | , |
Other Authors: | |
Format: | Conference Proceeding eBook |
Language: | English |
Published: |
Dordrecht ; Boston :
Kluwer Academic Publishers,
[1997]
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Series: | NATO ASI series. Applied sciences ;
no. 336. |
Subjects: |
Internet
Full Text (via Springer)Online
Call Number: |
TA2020 .P532 1997eb
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TA2020 .P532 1997eb | Available |