Transport Simulation in Microelectronics [electronic resource] / by Alfred Kersch, William J. Morokoff.
Computer simulation of semiconductor processing equipment and devices requires the use of a wide variety of numerical methods. Of these methods, the Monte Carlo approach is perhaps most fundamentally suited to mod eling physical events occurring on microscopic scales which are intricately connected...
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Full Text (via Springer) |
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| Format: | Electronic eBook |
| Language: | English |
| Published: |
Basel :
Birkhäuser Basel,
1995.
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| Series: | Progress in numerical simulation for microelectronics ;
3. |
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Internet
Full Text (via Springer)Online
| Call Number: |
QA297-299.4
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| QA297-299.4 | Available |