Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications....
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| Online Access: |
Full Text (via Knovel) |
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| Corporate Author: | |
| Other Authors: | , , |
| Other title: | UCPSS 2012. |
| Format: | Conference Proceeding eBook |
| Language: | English |
| Published: |
Durnten-Zurich, Switzerland :
Trans Tech Publications Ltd.,
[2013]
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| Series: | Diffusion and defect data. Solid state phenomena ;
v. 195. |
| Subjects: |
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| Call Number: |
QC611.6.S9 I68 2013eb
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| QC611.6.S9 I68 2013eb | Available |