A Plasma Lens for Magnetron Sputtering [electronic resource]
A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate.
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Online Access |
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| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Berkeley, Calif. : Oak Ridge, Tenn. :
Lawrence Berkeley National Laboratory ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2010.
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Internet
Online AccessOnline
| Call Number: |
E 1.99:lbnl-4156e
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| E 1.99:lbnl-4156e | Available |