Understanding the mechanism of base development of HSQ [electronic resource]
We study the dissolution mechanism of HSQ (hydrogen silsesquioxane) in base solutions with the addition of chloride salts to elucidate the development mechanism. Reaction mechanisms are proposed based on the dissolution mechanism of quartz. Development kinetics points to two dose-dependent developme...
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Format: | Government Document Electronic eBook |
Language: | English |
Published: |
Berkeley, Calif. : Oak Ridge, Tenn. :
Lawrence Berkeley National Laboratory ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2009.
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Internet
Online AccessOnline
Call Number: |
E 1.99:lbnl-2406e
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E 1.99:lbnl-2406e | Available |