Plasma "anti-assistance" and "self-assistance" to high power impulse magnetron sputtering [electronic resource]
A plasma assistance system was investigated with the goal to operate high power impulse magnetron sputtering (HiPIMS) at lower pressure than usual, thereby to enhance the utilization of the ballistic atoms and ions with high kinetic energy in the film growth process. Gas plasma flow from a constrict...
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Online Access |
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| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Berkeley, Calif. : Oak Ridge, Tenn. :
Lawrence Berkeley National Laboratory ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2009.
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Internet
Online AccessOnline
| Call Number: |
E 1.99:lbnl-1472e
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| E 1.99:lbnl-1472e | Available |