High power impulse magnetron sputtering Current-voltage-timecharacteristics indicate the onset of sustained self-sputtering.

High power impulse magnetron sputtering [electronic resource] : Current-voltage-timecharacteristics indicate the onset of sustained self-sputtering.

The commonly used current-voltage characteristics are foundinadequate for describing the pulsed nature of the high power impulsemagnetron sputtering (HIPIMS) discharge, rather, the description needs tobe expanded to current-voltage-time characteristics for each initial gaspressure. Using different t...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Lawrence Berkeley National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : Building Technologies Program (U.S.) ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2007.
Subjects:
Availability.
Trapping.
Sputtering.
Switches.
Magnetrons.
Electrons.
Targets.

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Call Number: E 1.99:lbnl--63685
E 1.99:lbnl--63685 Available

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