Multilayer Phase-Only Diffraction Gratings [electronic resource] : Fabrication andApplication to EUV Optics.
The use of phase-only diffractive devices has long played an important role in advanced optical systems in varying fields. Such devices include gratings, diffractive and holographic optical elements, diffractive lenses, and phase-shift masks for advanced lithography. Extending such devices to the in...
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Online Access |
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| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Berkeley, Calif. : Oak Ridge, Tenn. :
Lawrence Berkeley National Laboratory ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2007.
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Internet
Online AccessOnline
| Call Number: |
E 1.99:lbnl--63272
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| E 1.99:lbnl--63272 | Available |