Direct single ion machining of nanopores. [electronic resource]

The irradiation of thin insulating films by high-energy ions (374 MeV Au{sup +25} or 241 MeV I{sup +19}) was used to attempt to form nanometer-size pores through the films spontaneously. Such ions deposit a large amount of energy into the target materials (≈20 keV/nm), which significantly disrupts t...

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Bibliographic Details
Online Access: Online Access (via OSTI)
Corporate Author: Sandia National Laboratories (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Department of Energy. ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2004.
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Call Number: E 1.99:sand2004-5090
E 1.99:sand2004-5090 Available