Sputter Deposition of Silicon-Oxide Optical Coatings [electronic resource]
Fused silica and Si-Oₓ coatings are of interest for use under high flux conditions of laser light. Si-Oₓ coatings are sputter deposited from silicon and fused quartz targets using planar magnetrons operated in the rf mode with a variable working-gas mixture of Argon-Oxygen. A series of coatings are...
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| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C. : Oak Ridge, Tenn. :
United States. Department of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy,
2002.
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Internet
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| Call Number: |
E 1.99:ucrl-jc-147814
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| E 1.99:ucrl-jc-147814 | Available |