Effects of electron current and collisional interactions in inductively coupled plasma (ICP) reactors

Effects of electron current and collisional interactions in inductively coupled plasma (ICP) reactors [electronic resource]

In continuum modeling of low pressure plasma discharges, electron collisional interaction terms are modeled using collision frequencies based on electron temperature. However, this becomes inaccurate in ICP reactors where the directed azimuthal electron velocity can become comparable to the electron...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Los Alamos National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Department of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Department of Energy, 2002.
Subjects:
Argon.
Collision Integrals.
Current Density.
Deposition.
Electric Conductivity.
Electric Fields.
Electron Temperature.
Electrons.
Mixtures.
Plasma.
Simulation.
Transport.
Velocity.
Plasma Physics And Fusion Technology.

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Call Number: E 1.99:la-ur-02-6196
E 1.99:la-ur-02-6196 Available

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