Actinic defect counting statistics over 1 cm2 area of EUVL mask blank

Actinic defect counting statistics over 1 cm2 area of EUVL mask blank [electronic resource]

As a continuation of comparison experiments between EUV inspection and visible inspection of defects on EUVL mask blanks, we report on the result of an experiment where the EUV defect inspection tool is used to perform at-wavelength defect counting over 1 cm² of EUVL mask blank. Initial EUV inspecti...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Lawrence Berkeley National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy. Division of Materials Sciences ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2000.
Subjects:
Nondestructive Testing.
Extreme Ultraviolet Radiation.
Scattering.
Integrated Circuits.
Visible Radiation.
Defects.
Statistics.
Masking.
Etching.
Engineering.

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Call Number: E 1.99:lbnl--45327
E 1.99:lbnl--45327 Available

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