Focused ion beam damage to MOS integrated circuits

Focused ion beam damage to MOS integrated circuits [electronic resource]

Commercial focused ion beam (FIB) systems are commonly used to image integrated circuits (ICS) after device processing, especially in failure analysis applications. FIB systems are also often employed to repair faults in metal lines for otherwise functioning ICS, and are being evaluated for applicat...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Sandia National Laboratories (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 2000.
Subjects:
Charge Collection.
Materials Testing.
Physical Radiation Effects.
Integrated Circuits.
Ion Beams.
Uses.
Gallium Ions.
Instrumentation Related To Nuclear Science And Technology.

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Call Number: E 1.99:sand2000-1163c
E 1.99:sand2000-1163c Available

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