Focused ion beam damage to MOS integrated circuits [electronic resource]
Commercial focused ion beam (FIB) systems are commonly used to image integrated circuits (ICS) after device processing, especially in failure analysis applications. FIB systems are also often employed to repair faults in metal lines for otherwise functioning ICS, and are being evaluated for applicat...
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Corporate Author: | |
Format: | Government Document Electronic eBook |
Language: | English |
Published: |
Washington, D.C : Oak Ridge, Tenn. :
United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
2000.
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Internet
Online AccessOnline
Call Number: |
E 1.99:sand2000-1163c
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E 1.99:sand2000-1163c | Available |