Pore characterization in low-k dielectric films using x-ray reflectivity [electronic resource] : x-ray porosimetry / Christopher L. Soles ... [and others]

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Bibliographic Details
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Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Soles, Christopher L.
Format:	Government Document Electronic eBook
Language:	English
Published:	[Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2004]
Series:	NIST special publication ; 960-13. NIST recommended practice guide.
Subjects:	Dielectric films. Porosity.

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Call Number:	C 13.10:960-13
C 13.10:960-13	Available