Control of texture during vapor deposition of Al on (111) Si

Control of texture during vapor deposition of Al on (111) Si [electronic resource]

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The growth of Al on (111) Si single crystal substrates by various techniques usually leads to films with (111) texture, sometimes with a small (100) component. Using X-ray diffraction and electron microscopy, the present study shows that the (100) texture component can be enhanced to the point of fo...

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Bibliographic Details
Online Access: Online Access
Corporate Authors: Lawrence Berkeley Laboratory (Researcher), Lawrence Berkeley National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1991.
Subjects:
X-ray Diffraction.
Deposition.
Coatings.
Copper.
Crystals.
Electron Microscopy.
Silicon.
Grain Boundaries.
Texture.
Aluminium.
Materials Science.

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Call Number: E 1.99: conf-910406--39
E 1.99: conf-910406--39 Available

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