Gettering in multicrystalline silicon [electronic resource] : A design-of-experiments approach.
Design-of-experiment methods were used to study gettering due to phosphorus diffusion and aluminum alloying in four industrial multicrystalline silicon materials: Silicon-Film material from AstroPower, heat-exchanger method (HEM) material from Crystal Systems, edge-defined film-fed growth (EFG) mate...
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Online Access |
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| Format: | Government Document Electronic eBook |
| Language: | English |
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Washington, D.C. : Oak Ridge, Tenn. :
United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
1994.
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Internet
Online AccessOnline
| Call Number: |
E 1.99: conf-941203--4
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| E 1.99: conf-941203--4 | Available |