A 2D fluid model of the DC planar magnetron cathode [electronic resource]
This model finds the plasma density distribution, n(x,y), and the positive electrical potential, φ{sub {infinity}}, between the surface of a planar magnetron cathode and a distant, uniform plasma. The intended application is for parameter studies of gas discharges in the range of 1--100 mTorr, which...
Saved in:
Online Access: |
Online Access |
---|---|
Corporate Author: | |
Format: | Government Document Electronic eBook |
Language: | English |
Published: |
Washington, D.C. : Oak Ridge, Tenn. :
United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
1995.
|
Subjects: |
Internet
Online AccessOnline
Call Number: |
E 1.99:UCRL-ID--122494
|
---|---|
E 1.99:UCRL-ID--122494 | Available |