A 2D fluid model of the DC planar magnetron cathode [electronic resource]

This model finds the plasma density distribution, n(x,y), and the positive electrical potential, φ{sub {infinity}}, between the surface of a planar magnetron cathode and a distant, uniform plasma. The intended application is for parameter studies of gas discharges in the range of 1--100 mTorr, which...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Lawrence Livermore National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1995.
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Call Number: E 1.99:UCRL-ID--122494
E 1.99:UCRL-ID--122494 Available