Comparing a 2D fluid model of the DC planar magnetron cathode to experiments

Comparing a 2D fluid model of the DC planar magnetron cathode to experiments [electronic resource]

Planar magnetron cathodes have arching magnetic field lines which concentrate plasma density near the electrode surface. This enhances the ion bombardment of the surface and the yield of sputtered atoms. Magnetron cathodes are used in the Plasma Electrode Pockels Cell (PEPC) devices of the Laser Pro...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Lawrence Livermore National Laboratory (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1996.
Subjects:
Magnetrons.
Cathodes.
Magnetic Field Configurations.
Plasma Density.
Number Codes.
Magnetic Fields.
Vector Currents.
Vector Fields.
Vector Processing.
Vectors.
Electromagnetic Fields.
Electric Fields.
Helium.
Glow Discharges.
Computer Calculations.
Engineering Not Included In Other Categories;66 Physics.

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Call Number: E 1.99:UCRL-ID--125434
E 1.99:UCRL-ID--125434 Available

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