Integrated mold/surface-micromachining process

Integrated mold/surface-micromachining process [electronic resource]

We detail a new monolithically integrated silicon mold/surface-micromachining process which makes possible the fabrication of stiff, high-aspect-ratio micromachined structures integrated with finely detailed, compliant structures. An important example, which we use here as our process demonstration...

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Bibliographic Details
Online Access: Online Access
Corporate Author: Sandia National Laboratories (Researcher)
Format: Government Document Electronic eBook
Language:English
Published: Washington, D.C. : Oak Ridge, Tenn. : United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy, 1996.
Subjects:
Molding.
Machining.
Accelerometers.
Integrated Circuits.
Surface Finishing.
Silicon.
Size.
Etching.
Polishing.
Materials Science.
Engineering Not Included In Other Categories.

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Call Number: E 1.99: conf-960268--4
E 1.99: conf-960268--4 Available

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