Micromachining and microfabrication process technology XIV [electronic resource] : 27 January 2009, San Jose, California, United States / Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; symposium cosponsors, Texas Instruments Inc. (United States) [and others]

Saved in:

Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Author:	SPIE (Society)
Other Authors:	Perez-Maher, Mary Ann, Chiao, Jung-Chih, Resnick, Paul J.
Other title:	Micromachining and microfabrication process technology 14. Micromachining and microfabrication process technology fourteen. SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, 2009.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 7204.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Miniature electronic equipment > Design and construction > Congresses. Electromechanical devices > Design and construction. Microfabrication. Micromachining. Miniature electronic equipment > Design and construction. Conference papers and proceedings.

Internet

Holdings details from Online
Call Number:	QC176.8.M5 M4 2009e
QC176.8.M5 M4 2009e	Available