Advances in metrology for x-ray and EUV optics [electronic resource] : 2-3 August, 2005, San Diego, California, USA / Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Author:	Society of Photo-Optical Instrumentation Engineers
Other Authors:	Assoufid, Lahsen, Takacs, Peter Z., Taylor, John S., 1956-
Other title:	SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©2005.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5921.
Subjects:	Optical measurements > Congresses. Optical instruments > Design and construction > Congresses. Measuring instruments > Design and construction > Congresses. Laser interferometers > Congresses. Measurement > Congresses. Laser interferometers. Measurement. Measuring instruments > Design and construction. Optical instruments > Design and construction. Optical measurements. Conference papers and proceedings.

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Call Number:	QC367 .A338 2005
QC367 .A338 2005	Available