Two- and three-dimensional methods for inspection and metrology V [electronic resource] : 11-12 September 2007, Boston, Massachusetts, USA / Peisen S. Huang, editor ; sponsored and published by SPIE.

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Bibliographic Details
Online Access: Full Text (via SPIE Digital Library)
Corporate Author: SPIE (Society)
Other Authors: Huang, Peisen S.
Other title:SPIE digital library.
Format: Electronic eBook
Language:English
Published: Bellingham, Wash. : SPIE, ©2007.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6762.
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Call Number: TA1632 .T89 2007e
TA1632 .T89 2007e Available