Smart sensors, actuators, and MEMS III [electronic resource] : 2-4 May 2007, Maspalomas, Gran Canaria, Spain / Thomas Becker, Carles Cané, N. Scott Barker, editors ; sponsored by SPIE Europe ; cooperating organizations, PhOREMOST [and others]
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| Corporate Authors: | , , |
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| Other title: | SPIE digital library. |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Bellingham, Wash. :
SPIE,
©2007.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 6589. |
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Table of Contents:
- The nano revolution: bottom-up manufacturing with biomolecules / Yi-Fen Li [and others]
- Fabrication and characterization of a passive silicon-based direct methanol fuel cell / J.P. Esquivel [and others]
- Low-power low-latency MAC protocol for aeronautical applications / Jordi Sabater [and others]
- Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators / C. Serre [and others]
- Implementation of hard magnetic thin films on suspended cantilevers for electromagnetic energy harvesters / E. Makarona [and others]
- A compact optical ethylene monitoring system / J. Wöllenstein [and others]
- Oxygen measurements at high pressures using a low cost, polarisation stabilized, widely tunable vertical-cavity surface-emitting laser / Benjamin Scherer [and others]
- Thermo-activated nano-material for use in optical devices / Solon Mias, Jan Sudor, and Henri Camon
- Dye based light sensor for tag integration / I. Sayhan [and others]
- LTCC: a fascinating technology platform for miniaturized devices / U. Schmid
- Ferromagnetic 3-D impellor-shaped micro-stirrer bar for micromixing / Arun K. Nallani and Jeong-Bong Lee
- Development of MEMS-based liquid chromatography modules for agrofood applications / Antonella Benvenuto [and others]
- Microfluidic chamber with acoustic actuation by LiNbO3 interdigital transducers for tumor cell investigations / Matthias Gruber [and others]
- Presentation of silicon platforms for wireless advanced networks of sensors for aeronautics application / K. Moreau [and others]
- A novel low-power fluxgate sensor using a macroscale optimisation technique for space physics instrumentation / G. Dekoulis and F. Honary
- Investigations on the passivation of thin film flow sensors on flexible substrates / U. Schmid [and others]
- A tuning fork gyroscope with compensated imbalance signal / E. Arnold and F. Nuscheler
- A new micromachined sensor system for tactile measurements of high-aspect ratio microstructures / M. Balke, E. Peiner, and L. Doering
- Searching for hypothetical forces in the Casimir regime using a MEMS based force sensor / Ricardo S. Decca [and others]
- Resonance frequencies and modal shape characterization of piezoelectric microcantilevers / P. Sanz-González [and others]
- Silicon cantilever sensor for micro-/nanoscale dimension and force metrology / Erwin Peiner [and others]
- Feedback loops with electrically driven microcantilevers / Javier Malo and José-Ignacio Izpura
- Fabrication process for a flexible tag microlab / E. Abad [and others]
- Ultra-low-power electronics and devices for a multisensing RFID tag / Stefano Zampolli [and others]
- RFID reader with gas sensing capability for monitoring fruit along the logistic chain: array development and signal processing / Eduard Llobet [and others]
- Design of all-plastic distributed pressure sensors based on electroactive materials / Estibalitz Ochoteco [and others]
- Two-dimensional MEMS array for maskless lithography and wavefront modulation / D. López [and others]
- Plasma-activated wafer bonding: the new low-temperature tool for MEMS fabrication / V. Dragoi [and others]
- The influence of varying sputter deposition conditions on the wet chemical etch rate of AlN thin films / A. Ababneh [and others]
- Temperature stress impact on power RF MEMS switches / Chloé Bordas [and others]
- Inductively coupled MEMS-based micro RFID transponder / Hong M. Lu, Chuck Goldsmith, and Jeong-Bong Lee
- Germanium as an integrated resistor material in RF MEMS switches / K. Grenier [and others]
- A metal-to-metal contact RF MEMS switch towards handsets applications / Tauno Vähä-Heikkilä and Pekka Rantakari
- Detection of unburned fuel as contaminant in engine oil by a gas microsensor array / Simonetta Capone [and others]
- Nano and micro stripe based metal oxide thin film gas sensor / Stefan Palzer [and others]
- Nanofabrication of TiO2 nanowires: I-V characteristic and improvement of metal oxides gas sensing properties / L. Francioso [and others]
- Bismuth film electrodes for heavy metals determination / Vlastimil Rehacek [and others]
- Gamma radiation and ozone sensing properties of In2O3:ZnO:SnO2 thin films / K. Arshak, O. Korostynska, and G. Hickey
- Quartz crystal nano-balance for hydrogen sensing at room temperature using carbon nanotubes aggregates / M. Lucci [and others]
- Design and development of a microheater on GaAs for MEMS gas sensor array / Ivan Hotovy [and others]
- Mixed metal oxide films as pH sensing materials / Khalil Arshak [and others]
- Micro and nanotechnologies for the development of an integrated chromatographic system / O. Casals [and others]
- The MicroActive project: automatic detection of disease-related molecular cell activity / Liv Furuberg [and others]
- DLC/TiNi microcage for biopsy applications / Y.Q. Fu [and others]
- SMA micro actuators for active shape control, handling technologies, and medical applications / M. Leester-Schädel [and others]
- An alternative system for mycotoxin detection based on amorphous silicon sensors / D. Caputo [and others]
- Pulse voltammetry wine defects identification by means of miniaturized microelectrodes / L. Francioso [and others]
- Development of automated microrobot-based nanohandling stations for nanocharacterization / Sergej Fatikow [and others]
- Identification of wine defects by means of a miniaturized electronic tongue / G. Verrelli [and others]
- On the influence of nano-sized palladium clusters at the surface of SnO2 thin films on the gas response / Stefan Palzer [and others]
- Three-dimensional simulation of sacrificial etching / Johann Cervenka, Hajdin Ceric, and Siegfried Selberherr
- Application of PZT thick-films on adjusting purposes in micro-optical systems / C. Bruchmann [and others]
- VHDL implementation of a communication interface for ingrated MEMS / E. Magdaleno Castelló, M. Rodríguez Valido, and A.J. Ayala Alfonso
- Modelling and simulation of a micromachined angular rate sensor with optimised mechanical suspension / A. Kulygin [and others]
- Physical modeling of a highly sensitive linear MOS sensor for 2D detection of magnetic fields / Ali Abou-Elnour [and others]
- Coupling coefficient determination based on simulation and experiment for ST-cut quartz saw delay-line response / Yi-Chu Hsu, Ngoc-Bich Le, and Ling-Sheng Jang
- A domotic application for educational tasks / S. Alayón [and others]