Smart sensors, actuators, and MEMS III 2-4 May 2007, Maspalomas, Gran Canaria, Spain /

Smart sensors, actuators, and MEMS III [electronic resource] : 2-4 May 2007, Maspalomas, Gran Canaria, Spain / Thomas Becker, Carles Cané, N. Scott Barker, editors ; sponsored by SPIE Europe ; cooperating organizations, PhOREMOST [and others]

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Bibliographic Details
Online Access: Full Text (via SPIE Digital Library)
Corporate Authors: SPIE Europe, PhOREMOST, Society of Photo-Optical Instrumentation Engineers
Other Authors: Becker, Thomas, Cané, Carles, Barker, N. Scott
Other title:SPIE digital library.
Format: Electronic eBook
Language:English
Published: Bellingham, Wash. : SPIE, ©2007.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 6589.
Subjects:
Microelectromechanical systems > Congresses.
Microtechnology > Congresses.
Actuators > Industrial applications > Congresses.
Detectors > Industrial applications > Congresses.
Scanning systems > Congresses.

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Full Text (via SPIE Digital Library)

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Call Number: TK7875 .S518 2007e
TK7875 .S518 2007e Available

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