Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor : Norbert Kockmann.
Saved in:
| Other Authors: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Weinheim : [Chichester] :
Wiley-VCH ; [John Wiley [distributor]],
©2006.
|
| Series: | Advanced micro & nanosystems ;
v. 5. |
| Subjects: |
Closed Stacks - Engineering Math & Physics Library - Stacks
| Call Number: |
TS183 .M52 2006
|
|---|---|
| TS183 .M52 2006 | Available Place a Hold |