Microelectronic device and multilevel interconnection technology II [electronic resource] : 16-17 October, 1996, Austin, Texas / Ih-chin Chen [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and others]

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, SPIE Digital Library
Other Authors:	Chen, Ih-Chin
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1996.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2875.
Subjects:	Microelectronics > Congresses. Microelectronics. Conference papers and proceedings.

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Call Number:	TK7874 .M4676 1996
TK7874 .M4676 1996	Available