Design, characterization, and packaging for MEMS and microelectronics [electronic resource] : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)
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Corporate Authors: | , , , |
Other Authors: | , |
Format: | Electronic eBook |
Language: | English |
Published: |
Bellingham, Wash. :
SPIE,
©1999.
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Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3893. |
Subjects: |
Internet
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Call Number: |
TK7875 .D465 1999
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TK7875 .D465 1999 | Available |