Design, characterization, and packaging for MEMS and microelectronics [electronic resource] : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, IREE Society, Queensland. Government State Development, SPIE Digital Library
Other Authors:	Courtois, B. (Bernard), Demidenko, S. N. (Sergeĭ Nikolaevich)
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, ©1999.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3893.
Subjects:	Microelectromechanical systems > Design and construction > Congresses. Microelectronic packaging > Congresses. Microelectromechanical systems > Design and construction. Microelectronic packaging. Conference papers and proceedings.

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Call Number:	TK7875 .D465 1999
TK7875 .D465 1999	Available