Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic [and others] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.
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Corporate Authors: | , , |
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Other Authors: | |
Format: | Government Document Conference Proceeding Microfilm Book |
Language: | English |
Published: |
[Washington, D.C.] : Springfield, Va. :
NASA ; For sale by the National Technical Information Service,
[1990]
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Series: | NASA technical memorandum ;
102544. |
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Item Description: | Cover title. |
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Physical Description: | 15 pages : illustrations ; 28 cm. |
Bibliography: | Includes bibliographical references (page 13) |