Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic [and others] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.
Saved in:
Corporate Authors: | , , |
---|---|
Other Authors: | |
Format: | Government Document Conference Proceeding Microfilm Book |
Language: | English |
Published: |
[Washington, D.C.] : Springfield, Va. :
NASA ; For sale by the National Technical Information Service,
[1990]
|
Series: | NASA technical memorandum ;
102544. |
Subjects: |
Norlin Library - Government Information - Microform
Call Number: |
NAS 1.15:102544
|
---|---|
NAS 1.15:102544 | Restricted Place a Hold |