Characterization and metrology for ULSI technology, 2000 : international conference, Gaithersburg, Maryland, 26-29 June 2000 / editors, David G. Seiler [and others]
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Format: | Conference Proceeding Book |
Language: | English |
Published: |
Melville, NY :
American Institute of Physics,
2001.
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Series: | AIP conference proceedings ;
no. 550. |
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PASCAL Offsite
Call Number: |
TK7874.76 .C48 2000
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TK7874.76 .C48 2000 | Available Place a Hold |