Microelectronic structures and MEMS for optical processing.

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Bibliographic Details
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), SPIE Digital Library
Format:	Serial
Language:	English
Published:	Bellingham, Wash., USA : SPIE--The International Society for Optical Engineering, ©1995-
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641. Proceedings of SPIE--the International Society for Optical Engineering ; v. 2881. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3513.
Subjects:	Microelectronics > Congresses. Micromechanics > Congresses. Optics > Congresses.

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