Polymers for microelectronics : resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.

Saved in:

Bibliographic Details
Corporate Authors:	American Chemical Society. Division of Polymeric Materials: Science and Engineering, American Chemical Society. Meeting
Other Authors:	Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi
Format:	Book
Language:	English
Published:	Washington, DC : American Chemical Society, 1994.
Series:	ACS symposium series ; 537.
Subjects:	Microelectronics > Materials. Polymers.

PASCAL Offsite

Holdings details from PASCAL Offsite
Call Number:	TK7871.15.P6 P628 1994
TK7871.15.P6 P628 1994	Available Place a Hold