Methods and materials in microelectronic technology /

Methods and materials in microelectronic technology / edited by Joachim Bargon.

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Bibliographic Details
Corporate Author: International Symposium on Methods and Materials in Microelectronic Technology Bad Neuenahr-Ahrweiler, Germany
Other Authors: Bargon, Joachim
Other title:Microelectronic technology.
Format: Conference Proceeding Book
Language:English
Published: New York : Plenum Press, ©1984.
Series:IBM research symposia series.
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Congresses.
Photolithography > Congresses.
Ion beam lithography > Congresses.
X-ray lithography > Congresses.

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Call Number: TK7874 .I5924 1982
TK7874 .I5924 1982 Available Place a Hold

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