Micro electro-fabrication / edited by Tanveer Saleh, Mohamed Sultan Mohamed Ali, Kenichi Takahata.

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Bibliographic Details
Online Access:	Full Text (via ScienceDirect)
Other Authors:	Saleh, Tanveer (Editor), Ali, Mohamed Sultan Mohamed (Editor), Takahata, Kenichi (Editor)
Format:	eBook
Language:	English
Published:	Amsterdam ; Cambridge, MA : Elsevier, [2021]
Series:	Micro & nano technologies.
Subjects:	Nanoelectronics. Microfabrication.

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Holdings details from Online
Call Number:	TJ1191.5
TJ1191.5	Available