Nanoscale redox reaction at metal/oxide interface [electronic resource] : a case study on Schottky contact and ReRAM / Takahiro Nagata.
This book examines the investigation and intentional control of metal/oxide interface structure and electrical properties with the data obtained using non-destructive methods such as x-ray photoelectron spectroscopy (XPS) and x-ray reflectometry (XRR)
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Main Author: | |
Format: | Electronic eBook |
Language: | English |
Published: |
Tokyo :
Springer,
2020.
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Series: | NIMS monographs.
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Subjects: |
MARC
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100 | 1 | |a Nagata, Takahiro. | |
245 | 1 | 0 | |a Nanoscale redox reaction at metal/oxide interface |h [electronic resource] : |b a case study on Schottky contact and ReRAM / |c Takahiro Nagata. |
260 | |a Tokyo : |b Springer, |c 2020. | ||
300 | |a 1 online resource (95 pages) | ||
336 | |a text |b txt |2 rdacontent. | ||
337 | |a computer |b c |2 rdamedia. | ||
338 | |a online resource |b cr |2 rdacarrier. | ||
490 | 1 | |a NIMS Monographs. | |
500 | |a Description based upon print version of record. | ||
505 | 0 | |a Intro -- Preface -- Acknowledgments -- Contents -- 1 General Introduction -- References -- 2 Changes in Schottky Barrier Height Behavior of Pt-Ru Alloy Contacts on Single-Crystal ZnO -- 2.1 Introduction -- 2.2 Interface Formation and Characterization -- 2.2.1 Schottky Barrier Height -- 2.2.2 Gibbs Free Energy: Ellingham Diagram -- 2.2.3 Phase Diagram -- 2.2.4 Characterization: Electrical Measurements -- 2.2.5 Characterization: X-Ray Photoelectron Spectroscopy -- 2.3 Combinatorial Synthesis of Binary Alloy Metal Contacts on Polar Face of ZnO -- 2.3.1 Crystal Structural Analysis. | |
505 | 8 | |a 2.3.2 Surface Morphology -- 2.3.3 Electrical Properties -- 2.3.4 Chemical Bonding States (HX-PES Measurements) -- 2.3.5 Surface Termination Effect -- 2.4 Summary -- References -- 3 Surface Passivation Effect on Schottky Contact Formation of Oxide Semiconductors -- 3.1 Introduction -- 3.2 Near-Atmospheric-Pressure Nitrogen Plasma Treatment -- 3.2.1 Atmospheric-Pressure Nitrogen Plasma Source -- 3.2.2 Nitridation of Oxide Surface -- 3.3 Near-Atmospheric-Pressure Nitrogen Plasma Passivation -- 3.3.1 Nitridation of ZnO Surface -- 3.3.2 Improvement of Metal/ZnO Interface -- References. | |
505 | 8 | |a 4 Bias-Induced Interfacial Redox Reaction in Oxide-Based Resistive Random-Access Memory Structure -- 4.1 Introduction -- 4.2 Nanoionic-Type ReRAM Structure -- 4.2.1 Sample Structure -- 4.2.2 Electrical Properties of Cu/HfO2/Pt Structure -- 4.3 HX-PES Measurements Under Bias Application -- 4.3.1 Cu/HfO2 Interface -- 4.3.2 Pt/HfO2 Interface -- 4.4 Filament Formation Process in Cu/HfO2/Pt and Pt/HfO2/Pt ReRAM Structures -- 4.5 Bias-Induced Cu Migration Behavior in Cu/HfO2 ReRAM Structure -- 4.6 Effect of Bottom Electrode on Interfacial Structure and Switching Behavior. | |
505 | 8 | |a 4.6.1 Electrical Properties of Pt/Cu/HfO2/Pt/Si and Pt/Cu/HfO2/TiN/Si Structures -- 4.6.2 Interfacial Structure Between Cu and HfO2 -- 4.6.3 Correlation Between Ion Migration and Switching Degradation -- 4.6.4 Effect of Bottom Electrode on Conductive Filament Formation -- 4.7 Summary -- References -- 5 Switching Control of Oxide-Based Resistive Random-Access Memory by Valence State Control of Oxide -- 5.1 Introduction -- 5.2 Valence Control Scheme -- 5.3 Combinatorial Synthesis -- 5.3.1 Ta-Nb Binary Oxide System -- 5.3.2 Valence State of Oxides -- 5.3.3 Electrical Properties -- 5.4 Summary. | |
504 | |a References -- 6 Combinatorial Thin-Film Synthesis for New Nanoelectronics Materials -- 6.1 Introduction -- 6.2 Combinatorial Thin-Film Synthesis -- 6.3 Focused Ar Ion-Beam Sputtering for Combinatorial Synthesis -- 6.3.1 Energy of Focused Ar Ion Beam Sputtering -- 6.3.2 Metal Thin-Film Growth on Oxide -- 6.3.3 Combinatorial Thin-Film Synthesis by FIBS -- 6.4 Combinatorial Characterization -- 6.4.1 Two-Dimensional X-Ray Diffraction Method -- 6.4.2 Atomic Force Microscopy-Based Electrical Property Mapping Method -- 6.5 Summary -- References -- 7 General Summary. | ||
504 | |a Includes bibliographical references. | ||
520 | |a This book examines the investigation and intentional control of metal/oxide interface structure and electrical properties with the data obtained using non-destructive methods such as x-ray photoelectron spectroscopy (XPS) and x-ray reflectometry (XRR) | ||
650 | 0 | |a Oxidation-reduction reaction. |0 http://id.loc.gov/authorities/subjects/sh85096311. | |
776 | 0 | 8 | |i Print version: |a Nagata, Takahiro |t Nanoscale Redox Reaction at Metal/Oxide Interface : A Case Study on Schottky Contact and ReRAM |d Tokyo : Springer,c2020 |z 9784431548492. |
830 | 0 | |a NIMS monographs. |0 http://id.loc.gov/authorities/names/n2014190016. | |
856 | 4 | 0 | |u https://colorado.idm.oclc.org/login?url=http://link.springer.com/10.1007/978-4-431-54850-8 |z Full Text (via Springer) |
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