Handbook of thin-film deposition processes and techniques : principles, methods, equipment and applications / edited by Krishna Seshan.
The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers...
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| Online Access: |
Full Text (via ScienceDirect) |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Norwich, N.Y. :
Noyes Publications/William Andrew Pub.,
©2002.
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| Edition: | 2nd ed. |
| Series: | Materials science and process technology series. Electronic materials and process technology.
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| Subjects: |
Internet
Full Text (via ScienceDirect)Online
| Call Number: |
TK7872.T55 H36 2002eb
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| TK7872.T55 H36 2002eb | Available |