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    Handbook of microlithography, micromachining, and microfabrication

    Published 1997
    Full Text (via SPIE Digital Library)
    Electronic eBook
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    Computer-controlled microshaping : 16-18 June 1999, Munich, Germany /

    Published 1999
    Book
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    Simulation, design, and performance of surface micromachined peristaltic pumps / by Stay, Matthew S.

    Published 2000
    Thesis Book
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    Micromachined mirrors / by Conant, Robert (Robert A.), 1970-

    Published 2003
    Book
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    Laser-assisted micro- and nanotechnologies 2003 : 29 June-3 July 2003, St. Petersburg, Russia /

    Published 2004
    Book
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