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  1. 1
    Metal multilayer mirrors for EUV wide field telescopes

    Metal multilayer mirrors for EUV wide field telescopes

    Published 1989
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  2. 2
    Study of impurities in the Tandem Mirror Experiment using extreme-ultraviolet spectroscopy

    Study of impurities in the Tandem Mirror Experiment using extreme-ultraviolet spectroscopy

    Published 1982
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  3. 3
    Imaging XUV spectroscopy of a Z-pinch plasma in the former Soviet Union

    Imaging XUV spectroscopy of a Z-pinch plasma in the former Soviet Union

    Published 1993
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  4. 4
    Beam line design for synchrotron spectroscopy in the VUV

    Beam line design for synchrotron spectroscopy in the VUV

    Published 1980
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  5. 5
    Use of diamond-turned mirrors for synchrotron radiation (SR)

    Use of diamond-turned mirrors for synchrotron radiation (SR)

    Published 1981
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  6. 6
    Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort

    Initial development of efficient, low-debris laser targets for the Sandia soft x-ray projection lithography effort

    Published 1997
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  7. 7
    Development of XUV-interferometry (155 {angstrom}) using a soft x-ray laser

    Development of XUV-interferometry (155 {angstrom}) using a soft x-ray laser

    Published 1995
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  8. 8
    Masks for extreme ultraviolet lithography

    Masks for extreme ultraviolet lithography

    Published 1998
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  9. 9
    Development of the MIT tabletop soft x-ray laser

    Development of the MIT tabletop soft x-ray laser

    Published 1991
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  10. 10
    Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

    Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography

    Published 1999
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  11. 11
    On orbit performance of the ALEXIS EUV telescopes

    On orbit performance of the ALEXIS EUV telescopes

    Published 1994
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  12. 12
    Tunable, narrow bandwidth 83 nm light source

    Tunable, narrow bandwidth 83 nm light source

    Published 1980
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  13. 13
    Surface and submicron physics

    Surface and submicron physics

    Published 1982
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  14. 14
    Extreme Ultraviolet Phase Contrast Imaging

    Extreme Ultraviolet Phase Contrast Imaging

    Published 2005
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  15. 15
    High sensitivity actinic detection of native defects on extreme ultraviolet lithography mask blanks

    High sensitivity actinic detection of native defects on extreme ultraviolet lithography mask blanks

    Published 2001
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  16. 16
    Soft X-Ray Spectroscopic Measurements of Plasma Conditions at Early Times in ICF Experiments on OMEGA. Final technical report

    Soft X-Ray Spectroscopic Measurements of Plasma Conditions at Early Times in ICF Experiments on OMEGA. Final technical report

    Published 2000
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  17. 17
    Actinic defect counting statistics over 1 cm2 area of EUVL mask blank

    Actinic defect counting statistics over 1 cm2 area of EUVL mask blank

    Published 2000
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  18. 18
    System integration and performance of the EUV engineering test stand

    System integration and performance of the EUV engineering test stand

    Published 2001
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  19. 19
    Operation of a Free-Electron Laser from the Extreme Ultraviolet to the Water Window

    Operation of a Free-Electron Laser from the Extreme Ultraviolet to the Water Window

    Published 2007
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  20. 20
    The SEMATECH Berkeley microfield exposure tool learning a the 22-nm node and beyond.

    The SEMATECH Berkeley microfield exposure tool learning a the 22-nm node and beyond.

    Published 2009
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