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  1. 1
    Nanostructured substrates for improved lift-off of III-V thin films

    Nanostructured substrates for improved lift-off of III-V thin films

    Published 2019
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  2. 2
    Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers

    Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers

    Published 2009
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  3. 3
    Systems and methods for perforation and ohmic contact formation for GaN epitaxial lift-off using an etch stop layer

    Systems and methods for perforation and ohmic contact formation for GaN epitaxial lift-off using an etch stop layer

    Published 2019
    Full Text (via OSTI)
    Government Document Electronic eBook
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