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  1. 1
    Polymers for microelectronics : resists and dielectrics /

    Polymers for microelectronics : resists and dielectrics /

    Published 1994
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  2. 2
    Polymers for high technology : electronics and photonics /

    Polymers for high technology : electronics and photonics /

    Published 1987
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  3. 3
    Materials for microlithography : radiation-sensitive polymers /

    Materials for microlithography : radiation-sensitive polymers /

    Published 1984
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