NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies /

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies / edited by M. Gentili, C. Giovannella, S. Selci.

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new fu...

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Bibliographic Details
Online Access: Full Text (via Springer)
Main Author: Gentili, M.
Other Authors: Giovannella, C., Selci, S.
Other title:Proceedings of the NATO Advanced Research Workshop, Frascati, Roma, Italy, April 6--8, 1993.
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands, 1994.
Series:NATO ASI series. Applied sciences ; 264.
Subjects:
Physics.
Computer engineering.
Surfaces (Physics)
Table of Contents:
  • Content
  • Electron Beam Lithography
  • Nanolithography, The Integrated System
  • Electron Beam Resists and Pattern Transfer Methods
  • Nanolithography Developed Through Electron-Beam-Induced Surface Reaction
  • Direct Writing of Nanoscale Patterns in SiO2
  • Sub-10 nm Electron Beam Lithography: -AlF-Doped Lithium Fluoride as a Resist
  • Surface Imaging for EB-Nanolithography
  • Patterning of InGaAs/GaAs Quantum Dots Using E-Beam Lithography and Selective Removal of the Top Barrier
  • Fabrication of Ultrasmail InGaAslInP Nanostructures by High Voltage Electron Beam Lithography and Wet Chemical Etching
  • Fabrication, Investigation and Manipulation of Artificial Nanostructures
  • Nano-Lithography in 3 Dimensions with Electron Beam Induced Deposition
  • Nanolithography Requirements
  • An Equipment Manufacturers View
  • X-Ray Lithography
  • X-Ray Nanolithography: Limits, and Applications to Sub-100 nm Manufacturing
  • X-Ray Phase Shifting Masks
  • Fabrication of X-Ray Mask for Nanolithography by EBL
  • Ion Beam Lithography
  • Intense Focused Ion Beams for Nanostructurisation
  • Latest Results Obtained with the Alpha Ion Projection Machine
  • STM Lithography
  • Direct Writing with a Combined STM/SEM System
  • Low Voltage E-Beam Lithography with the Scanning Tunneling Microscope
  • STM Nanolithography and Characterization of Passivated Silicon and Gallium Arsenide
  • Sub-20 nm Lithographic Patterning with the STM
  • Lithography of YBa2Cu3O7 Superconducting Thin Films with a Scanning Tunneling Microscope
  • Author Index.

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