Micro-flex mirror and instability actuation technique [electronic resource]
This paper reports on the design and fabrication of a surface micromachined mirror system which is capable of producing the required moments to rotate a mirror structure out of the plane of fabrication. The planar structures created by surface micromachining present difficulties with developing a su...
Saved in:
| Online Access: |
Online Access |
|---|---|
| Corporate Author: | |
| Format: | Government Document Electronic eBook |
| Language: | English |
| Published: |
Washington, D.C. : Oak Ridge, Tenn. :
United States. Dept. of Energy ; distributed by the Office of Scientific and Technical Information, U.S. Dept. of Energy,
1997.
|
| Subjects: |
Internet
Online AccessOnline
| Call Number: |
E 1.99: conf-980126--
|
|---|---|
| E 1.99: conf-980126-- | Available |