Micromachining and microfabrication process technology XIII [electronic resource] : 22-23 January 2008, San Jose, California, USA / Mary-Ann Maher, Jung-Chih Chiao, Paul J. Resnick, editors ; sponsored by SPIE ; cosponsored by the Photonics Center at Boston University (USA)

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Bibliographic Details
Online Access:	Full Text (via SPIE Digital Library)
Corporate Authors:	Boston University. Photonics Center, SPIE (Society)
Other Authors:	Perez-Maher, Mary Ann, Chiao, Jung-Chih, Resnick, Paul J.
Other title:	SPIE digital library.
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE, 2008.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 6882.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses. Electromechanical devices > Design and construction. Microfabrication. Micromachining. Conference papers and proceedings.

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Call Number:	QC176.8.M5 M43 2008
QC176.8.M5 M43 2008	Available