Effect of tilt angle on the morphology of SiC epitaxial films grown on vicinal (0001)SiC substrates [microform] / J.A. Powell [and others]

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Bibliographic Details
Corporate Author:	United States. National Aeronautics and Space Administration
Other Authors:	Powell, J. Anthony
Format:	Government Document Microfilm Book
Language:	English
Published:	[Washington, D.C.] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], [1996]
Series:	NASA technical memorandum ; 112470.
Subjects:	Morphology. Silicon. Epitaxy. Thin films. Atoms.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	NAS 1.15:112470
NAS 1.15:112470	Restricted Place a Hold